TiO2 and Al2O3 ultra thin nanolaminates growth by ALD; instrument automation and films characterization
Document indicators
altmetrics
Loading
Referências
Charts
Loading
This tool is under development and it is available in Beta Test version
This tool is under development and it was published with the objective to test the usage and performance. All the indicators are real and they are gradually being loaded. Slowness and out of service problems may occur in this version.
