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Journal of the Brazilian Society of Mechanical Sciences and Engineering (1678-5878)

Multiple phase silicon in submicrometer chips removed by diamond turning

Received Citations (1)

publishing year	previous	first author	document title
2007	Journal of the Brazilian Society of Mechanical Sciences and Engineering	Jasinevicius, Renato G.	In-situ raman spectroscopy analysis of re-crystallization annealing of diamond turned silicon crystal

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